PDF ADXRS300 Data sheet ( Hoja de datos )

Número de pieza	ADXRS300
Descripción	300/s Single Chip Yaw Rate Gyro with Signal Conditioning
Fabricantes	Analog Devices
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No Preview Available ! FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2000 g powered shock operation Self-test on digital command Temperature sensor output Precision voltage reference output Absolute rate output for precision applications 5 V single-supply operation Ultrasmall and light (< 0.15 cc, < 0.5 gram) APPLICATIONS Vehicle chassis rollover sensing Inertial measurement units Platform stabilization ±300°/s Single Chip Yaw Rate Gyro with Signal Conditioning ADXRS300 GENERAL DESCRIPTION The ADXRS300 is a complete angular rate sensor (gyroscope) that uses Analog Devices’ surface-micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics on one chip. The manufacturing technique for this device is the same high vol- ume BIMOS process used for high reliability automotive airbag accelerometers. The output signal, RATEOUT (1B, 2A), is a voltage proportional to angular rate about the axis normal to the top surface of the package (see Figure 3). A single external resistor can be used to lower the scale factor. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation (see Figure 4). A precision reference and a temperature output are also pro- vided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both sensors and the signal conditioning circuits. The ADXRS300 is available in a 7 mm × 7 mm × 3 mm BGA chip-scale package. ST1 5G ST2 4G FUNCTIONAL BLOCK DIAGRAM AVCC 3A + 5V – 100nF AGND 2G 1F 100nF CMID 1D COUT SUMJ 1C SELF TEST RATE SENSOR CORIOLIS SIGNAL CHANNEL π DEMOD RSEN1 RSEN2 ≈7kΩ ±35% ≈7kΩ ±35% RESONATOR LOOP ROUT 180kΩ 1% 1B RATEOUT 2A 2.5V REF 1E 2.5V CHARGE PUMP/REG. 12V PTAT 3G TEMP ADXRS300 PDD 4A 5A 7E CP2 CP1 22nF 6G 7F PGND 100nF 6A 7B 7C CP4 CP3 22nF 7D CP5 47nF Figure 1. Rev. A Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective companies. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.326.8703 © 2003 Analog Devices, Inc. All rights reserved. 1 page ADXRS300 THEORY OF OPERATION The ADXRS300 operates on the principle of a resonator gyro. Two polysilicon sensing structures each contain a dither frame, which is electrostatically driven to resonance. This produces the necessary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, orthogonal to the dither motion, are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure that senses Coriolis motion. The resulting signal is fed to a series of gain and demodulation stages that produce the electrical rate signal output. The dual-sensor design rejects external g-forces and vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments. The electrostatic resonator requires 14 V to 16 V for operation. Since only 5 V is typically available in most applications, a charge pump is included on-chip. If an external 14 V to 16 V supply is available, the two capacitors on CP1–CP4 can be omit- ted and this supply can be connected to CP5 (Pin 7D) with a 100 nF decoupling capacitor in place of the 47 nF. After the demodulation stage there is a single-pole low-pass filter consisting of an internal 7 kΩ resistor (RSEN1) and an external user-supplied capacitor (CMID). A CMID capacitor of 100 nF sets a 400 Hz ±35% low-pass pole and is used to limit high frequency artifacts before final amplification. Bandwidth limit capacitor, COUT, sets the pass bandwidth (see Figure 4 and the Setting Bandwidth section). 22nF 100nF CP4 CP3 CP5 PDD PGND 7B 7C 7D 7E 7F 6A CP1 22nF CP2 5A 4A 5V AVCC 3A 2A 47nF 100nF 6G 5G ST1 4G ST2 3G TEMP 2G 1B 1C RATEOUT SUMJ COUT = 22nF 1D 1E 1F CMID 2.5V AGND 100nF NOTE THAT INNER ROWS/COLUMNS OF PINS HAVE BEEN OMITTED FOR CLARITY BUT SHOULD BE CONNECTED IN THE APPLICATION. Figure 3. Example Application Circuit (Top View) Supply and Common Considerations Only power supplies used for supplying analog circuits are rec- ommended for powering the ADXRS300. High frequency noise and transients associated with digital circuit supplies may have adverse effects on device operation. Figure 3 shows the recommended connections for the ADXRS300 where both AVCC and PDD have a separate decoupling capacitor. These should be placed as close to the their respective pins as possible before routing to the system analog supply. This will minimize the noise injected by the charge pump that uses the PDD supply. It is also recommended to place the charge pump capacitors connected to the CP1–CP4 pins as close to the part as possible. These capacitors are used to produce the on-chip high voltage supply switched at the dither frequency at approximately 14 kHz. Care should be taken to ensure that there is no more than 50 pF of stray capacitance between CP1–CP4 and ground. Surface-mount chip capacitors are suitable as long as they are rated for over 15 V. + 5V - 100nF 100nF COUT ST1 5G ST2 4G AVCC 3A AGND 2G 1F CMID 1D SUMJ 1C SELF TEST CORIOLIS SIGNAL CHANNEL ROUT 180kΩ 1% RATE SENSOR π DEMOD RSEN1 RSEN2 ≈7kΩ ±35% RESONATOR LOOP 1B RATE- 2A OUT 2.5V REF 1E 2.5V PTAT ADXRS300 CHARGE PUMP/REG. 12V PDD 4A 5A 7E CP2 CP1 22nF 6G 7F 6A 7B 7C 7D CP4 CP3 CP5 PGND 47nF 22nF 3G TEMP 100nF Figure 4. Block Diagram with External Components Setting Bandwidth External capacitors CMID and COUT are used in combination with on-chip resistors to create two low-pass filters to limit the bandwidth of the ADXRS300’s rate response. The –3 dB fre- quency set by ROUT and COUT is ( )fOUT = 1/ 2 × π × ROUT ×COUT and can be well controlled since ROUT has been trimmed during manufacturing to be 180 kΩ ±1%. Any external resistor applied Rev. A \| Page 5 of 8 5 Page

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